Rapid Thermal Process Ovens

We are specialized in developing of rapid thermal annealing systems, mainly for R&D use. Actually we offer three different systems; depending on customers process demands. For special applications, wishes or options please do not hesitate to contact us.


RTP-100, front loading

Rapid Thermal Vacuum Process Oven with ramp-up rate up to 150 K/sec.

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RTP-100-HV (High Vacuum) front loading

High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 150 K/sec.

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RTP-150, front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 75 K/sec.

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RTP-150-EP (NEW), front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 150 K/sec.

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RTP-150-HV (High Vacuum), front loading

High vacuum compliant Rapid Thermal Process Oven with ramp up rate up to 75 K/sec.

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VPO-300 (automatic vertical open/close)

up to 10E-6 hPa vacuum (optional)

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