RSO-200frei.jpg

RSO-300

RSO-300 for wafer size up to 300 mm

Made in
Germany
easy to
maintain
Download

Configuration

Formic Acid
Gas line
Vacuum
Water Cooling System
Trap
Hydrogen option
Thermocouple
Measurement
Safety
Switchbox
Fixture of cabinet
Hood
Quartz Glass
Graphit
Power

Product code: RSO-300

Product price: on request
Delivery time: on request




Reflow Solder OvenTechnical Data RSO-300:

  • Loading area (max. part size): 300 mm x 300 mm x 35  mm (LxBxH)
  • incl. quartz glas holder and graphite crucible (optional : quartz star for 100mm-300mm wafer size)
  • with integrated gas- in- and outlet
  • 1 Mass Flow Controller fr Nitrogen 5 nlm is standard
  • heated by 12 Infrared lamps ( 18 kW)
  • bottom heating
  • vacuum for external pump system (up to 10exp.-3 hPa)
  • SPS controller, SIMATIC
  • 50 programs with 50 steps each storable
  • 7" Touch Panel for comfortable programming and process control   
  • Ethernet interface
  • Max. Temperature: 650 °C
  • Ramp up rate: better 10 K/Sec
    Ramp down rate: T=600°C to 400°C max. 250 K/min
    T=400°C to 100°C max. 30K/min
  • Temperature control by thermocouple
  • Cooling: Water cooling required (option)
  • Electrical connection: CEE 16 A (3x400V, 3 Phase, +N, +PE)
  • Weight: about 70 kg
  • Dimension: 578 mm x 496 mm x 570 mm (WxDxH)

Options and accessories:

RSO-300  Basic unit
RSO-GPC-300 Isostatic graphite crucible 260x260mm
RSO-MFC  Additonal gas line with mass flow controller (max. 4 gas lines)
MP  Membrane pump for vacuum up to 10 mbar with manometer
MPC Chemcial Membrane pump for vacuum up to 10 mbar with manometer
RVP Rotary vane pump for vacuum with oil filter up 10exp3 hPa
RSO-FA Formic Acid Option
RSO-H2 Module for using 100% Hydrogen including one mass flow controller
RSO-H2S Safety device to prevent uncontrolled emission of Hydrogen
RSO-TC add. thermocouple for measure on device (plugged in chamber)
WC III Closed loop water cooling system (stand-alone)

 

 

Click here
And we call you back

Vitit us at: