Rapid Thermal Process Ovens and Vacuum Process Oven




We are specialized in developing of rapid thermal annealing systems, mainly for R&D use. Actually we offer three different systems; depending on customers process demands. For special applications, wishes or options please do not hesitate to contact us.

NEW:  Vacuum Solder System , Model VSS-450-300 now available with overpressure

 


RTP-100, front loading

Rapid Thermal Vacuum Process Oven with ramp-up rate up to 150 K/sec.

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RTP-100-EP front loading with 200K/sec ramp up rate

Vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 200 K/sec.

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RTP-100-HV (High Vacuum) front loading

High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 150 K/sec.

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RTP-100-HV-EP (High Vacuum) front loading with 200K/sec ramp up rate

High vacuum compliant Rapid Thermal Process Oven with ramp-up rate up to 200 K/sec.

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RTP-150, front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 75 K/sec.

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RTP-150-EP (NEW), front loading

Rapid Thermal Vacuum Process Oven with ramp up rate up to 150 K/sec.

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RTP-150-HV (High Vacuum), front loading

High vacuum compliant Rapid Thermal Process Oven with ramp up rate up to 75 K/sec.

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RTP-200

NEW: RTP-200 for 200 mm(8") wafer size or M10 182 x 182 mm solarwafer

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VPO-300 (automatic vertical open/close)

up to 10E-6 hPa vacuum (optional)

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VPO-300-HV

VPO-300 HV Vacuum Process Oven with high vacuum

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