External Formic Acid Modul (including Mass Flow Controller) (able also for later retrofit)

Technical specification:

• The carrier gas (N2) is lead through a vessel filled with formic acid (FA) and takes small traces of formic acid. This gas mixture is guided through a corrugated metal pipe into process chamber of RSS-110-S reflow solder system.
• Including inlet (6 mm OD) for nitrogen (N2) gas (as carrier gas)
• Including PTFE tube for connection to RSS-110-S system
• Including connection cable for remote control by RSS-110-S reflow solder system
• Dimensions: 290 mm x 150 mm x 104 mm (d x w x h)

Weight: ca. 4.1 kg

Integrated Formic Acid Module with separate MFC for carrier gas (N2)

Technical specification:

• The carrier gas (nitrogen gas, N2) enters the vessel which is filled with formic acid (HCOOH) (integrated in housing of reflow solder system). From the liquid surface it will take small traces and lead them to process chamber. There the formic acid causes the reduction of native oxide layers and the improved wetting of solder.
• The reflow solder system is upgraded with an additional process gas line including a dedicated mass flow controller (MFC) for nitrogen gas (maximum flow: 5 Nlm (Normliter/minute)) as carrier gas for formic acid.

Process chamber will be upgraded by an interlock pin which prevents unintended opening of hinged cover during running process.

Formic Acid Module integrated but sharing the existing N2 gas line

Technical specification:

• The carrier gas (nitrogen gas, N2) enters the vessel which is filled with formic acid (HCOOH) (integrated in housing of reflow solder system). From the liquid surface it will take small traces and lead them to process chamber. There the formic acid causes the reduction of native oxide layers and the improved wetting of solder.
• The standard process gas line is shared between the direct connection into process chamber and a bypass through the formic acid vessel (i.e. no additional process gas line!).
• The flow of carrier gas (nitrogen gas, N2) is controlled by the mass flow controller (MFC) of standard system.

Process chamber will be upgraded by an interlock pin which prevents unintended opening of hinged cover during running process.

Additional gas line with  Mass Flow Controller, e.g. forming gas, argon or any other kind of inert gases. 

VAC I Vacuum Basic for e.g. membrane/diaphragm pump for vacuum up to 3 hPa

Scope of delivery:

• Absolute type pressure sensor (measurement range: 3...1000 hPa)
• Display and logging of pressure values on touch panel of vacuum system (pos. 1)
• Upgrade of gas outlet with ball check valve

Upgrade with vacuum valve DN16 (for connection of vacuum pump, vacuum pump not scope of delivery)

Vacuum Comfort Option for vacuum up to 10-3 hPa (e.g. for rotary vane pumps)

Scope of delivery:

• Digital Piezo/Pirani transmitter (measurement range: 1200 ... 5 x 10-4 hPa)
• Display and logging of pressure values through TP700 touch panel (pos. 1)
• Ball check valve

Vacuum valve (DN16 or DN25) for connection of vacuum pump (vacuum pump not included)

Membrane pump

Technical specification:

• Ultimate pressure: 2 mbar
• Pumping capacity: 4.5 m³/hr (@ 50 Hz)
• Dimensions: 230 mm x 380 mm x 170 mm (W x D x H)
• Weight: 19 kg

Electrical power supply: 230 V / 1 Phase / 50 Hz / 370 W

Chemically resistant membrane pump / diaphraghm pump (strictly recommended for using formic acid)

Technical specification:

• Ultimate pressure: 2 hPa
• Pumping capacity: 4.5 m³/hr (@ 50 Hz)
• Dimensions: 230 mm x 380 mm x 170 mm (W x D x H)
• Weight: 19 kg
• Electrical power supply: 230 V / 1 Phase / 50 Hz / 370 W

Remotely controlled (switched ON/OFF) by vacuum reflow solder system (pos. 1)

Rotary vane pump (Pfeiffer Vacuum DUO 3)

Technical specifications:

• Pumping capacity: 2.5 m³/hr
• Ultimate pressure: 3 x 10-3 hPa
• With oil filter
• Electrical power supply: 115V or 230 V / 50 Hz / 1 Phase / 150 W
• Dimensions: 130 mm x 310 mm x 180 mm (W x D x H)

Weight: 10.5 kg

Closed loop water cooling system (stand alone)

Technical specifications:

• Refrigeration capacity: 2.1 kW
• Tank capacity: 13 l
• Electrical connection type: Shockproof plug 1 x 230V, 1 ~,  N, PE, 1.3 kW
• Dimensions: 500 mm x 700 mm x 510mm (W x D x H)
• Weight: 52 kg

HTS code: 8419 8910

Closed loop water cooling system (stand alone)

Technical specification:

• Refrigeration capacity: 2.6 kW
• Tank capacity: 13 l
• Electrical connection type: Shockproof plug 1 x 230V, 1 ~,  N, PE, 2.0 kW
• Dimensions: 500 mm x 740 mm x 510 mm (W x D x H)
• Weight: 55 kg

HTS code: 8419 8910

Closed loop water cooling system

Technical specification:

• Refrigeration capacity: 3.9 kW
• Tank capacity: 13 l
• Electrical connection type: shockproof plug: 1 x 230 V, 1 ~,  N, PE, 2.4 kW
• Dimensions: 500 mm x 740 mm x 510 mm (W x D x H)
• Weight: 62 kg

HTS code: 8419 8910

Closed loop water cooling system

Technical specification:

• Refrigeration capacity: 8.8 kW
• Tank volume: 60 l
• Dimensions: 760 mm x 760 mm x 1335 mm (W x D x H)
• Weight: 140 kg

Electrical power supply: 400 V / 50 Hz / 3P + PE / 2.7 kW

Extension of maximum temperature from 400 °C up to 500 °C

Extension of chamber height from 60 mm to 80 mm

Trap for formic acid vapor (for pump protection)

Technical description:

This trap is integrated between vacuum valve and vacuum pump. Using an adsorption filter formic acid vapor is bound and can not reach the vacuum pump.

Including two adapters DN16KF to DN25KF to accomodate for difference between trap flange (DN25KF) and vacuum flange (DN16KF) size.

Trap for flux vapor (for protection of vacuum pump)

Technical description:

• This trap is integrated between vacuum valve and vacuum pump (at right side of VSS-450-300 system). Using an adsorption filter flux vapor is bound and can not reach the vacuum pump.
• Including two adapters DN16KF to DN25KF to accomodate for difference between trap flange (DN25KF) and vacuum flange (DN16KF) size.

Replacement of filter element is recommended after two to three months of usage or when pumping power significantly decreases. Spare filter elements are available at article number 19370.

Option: Usage of 100% hydrogen gas

Technical specification:

Hydrogen control unit integrated into RTP/RSO system (pos. 1)

Control of flow of pure (100%) hydrogen (H2) gas via Mass Flow Controller (MFC)

Automatic check of leak tightness of process chamber

Permanent control of H2 gas flow using N2 pressurized valves

Interlock with program start

Hydrogen flame-off unit at rear side of RTP/RSO system (above gas outlet) for preventing formation of explosive oxyhydrogen gas

Technical specification:

• This safety cabinet is adapted for reflow solder systems (RSS series) which feature a process gas line for pure hydrogen (100% H2) gas
• It allows placement of optional H2 gas box (art.no. 15011; wall panel with components for safe operation with pure hydrogen (100% H2) gas) and of flame-off unit (art.no. 19485; device for controlled burning (incineration) of hydrogen gas)
• The height of 1700 mm does not include optional hydrogen concentration sensor (art.no. 15013) or optional pat light (art.no. 11008).
• This rather low height of safety hood allows its easy transport into clean room or other lab facilities.
• The bottom side of this safety hood is empty and allows placement of cooling water supply or vacuum pump.
• Dimension: 600 mm x 700 mm x 1700 mm (W x D x H)

Weight: about 90 kg

Additional thermocouple for external measurement device

Technical specification:

• Upgrade of process chamber with TC connector (female) and with TC line to rear side of reflow solder oven (female TC connector)
• Additional TC , Type K, dia. 0,5mm, L=500mm
• Ideal to measure on device

Temperature measurement of additional thermocouple requires an external measurement tool (e.g. multimeter with measurement input for thermocouple).

Additional thermocouple with monitoring/logging function (not RSS-210-S)

Technical specification:

• A thermocouple (TC) connector is mounted on the outside of process chamber and connected to process control using a TC extension line.
• The thermocouple (type K (NiCr-Ni), length: 300 mm (RSO, RSS, RTP, RVS) or 500 mm (VSS, VPO), diameter: 0.5 mm, with plastic miniature connector) is guided through a vacuum feedthrough into the inside of process chamber and can be used for measurements on substrate surface.

The temperature of additional TC can be displayed and logged by touch panel of vacuum process or reflow solder system.

Technical specification:

• Measurement range of moisture (H2O) concentration: 0...500 ppm
• Operational pressure: atmosphere

Values of moisture concentration in process chamber can be displayed on touch panel of base system and can be logged into process data (when option is checked in menu "datalogger")

Interlock mechanism

Technical description:

• Chassis of  reflow vacuum solder system (pos. 1) will be upgraded with handle lock pin
• After activation of interlock option (by setting a check box in menu of process control) any unintentional opening of hinged cover and hence of process chamber during running process can be prevented.
• With activated interlock option the handle lock will be released after program stop and at temperature T < 80 °C (depending on setting of value)

Free of charge (100% discount) in case that option FA III will be purchased with this reflow solder system.

Adding of color signal tower to VSS-450-300 system (pos. )

Technical specification:

• Signal tower located at rear side of process system

Indication of system status by visual and acoustical signals

Side viewing windows (20mm high, 170 mm width) at both sides of hinged cover of RSS-210-S reflow solder system

This option includes a CCD camera with a macro lens suitable for observing the soldering process, which is  mounted on the hinged cover of the reflow solder system (RSS, RVS) by means of a suitable bracket. The solder process can be illuminated via a flexible LED light.

Technical specification:

• USB 3.0 camera with resolution 2560 x 1920 pixels or similar
• USB 3.0 cable (1.5m length)
• Macro Lens (Edmund, TECHSPEC UC-Series, 12 mm, 1/2")
• Mount for USB 3.0 camera and macro lens
• Including manual z-drive
• Mechanically adjustable LED light (gooseneck style)

A Windows PC with USB 3.0 interface port is provided by customer.

Power RSS-110-S EU

230V, P+N+PE, 1,6 kW

Power RSS-210-S EU

3 x 400 V, 50 Hz, 3~ + N + PE, 9.0 kW

Power RSS-110 JAPAN

200 V, 2~ + PE, 1,2 kW

Power RSS-210-S Japan

3x200V, 3~ +PE, 9.0 kW

Power supply RSS-110-S USA

115V AC, 60 Hz, P+PE, 1.2 kW

3 x 208V, 3~ +PE, D (triangle) configuration, 7.4kW, 21 A

Technical specification:

Nominal voltage/wattage of one IR heater: 230 V/1500 W

Reduction of maximum heating rate (see pos. 1) due to reduced power

Extension of maximum temperature of VPO-1000-300 system (pos. 1) up to 1200 °C

Technical specification:

• Durable time depending on cooling system
• Maximum holding time @ T = 1200 °C: 10 sec

Reduction of maximum ramp up rate

Extension of chamber height from 50 mm to 100mm , including viewing window (85 mm wide, 25 mm high)

Extension of maximum ramp up rate from 150 K/sec to 200 K/sec

Technical specification:

• IR lamps each with 2 kW nominal power (@ 230V)

Installation requirements: 2 x [3 x 400 V, 3~ + N + PE, star (Y) configuration, 32 A, 21 kW>

Extension of maximum temperature from 450 °C up to 600 °C

Technical specification:

• Reduction of width of heating plate from 300 mm to 280 mm

Cooling down of heating plate: from 600 °C to 450 °C using CDA; from 450 °C to room temperature using cooling water

Serial interface between VPO system and external PC

Technical description:

• Using USB 2.0 port and with communication through USB 2.0 cable
• An advanced communication protocol allows remote operation of VPO system from an external PC: selection of program number, start/stop of program, moving up/down of lift pins with relevant feedback and error signals

For opening/closing of top cover of VPO system option VPO-RC (remote control) is required as this operation is related to work safety.

Remote control of VPO system

Technical description:

• This option includes opening/closing of top cover of VPO system using potential free signals.

It also includes connection of VPO system to safety cover of external cabinet (opening of safety cover will disengage remote control i.e. only manual control buttons at front panel of VPO system will be active in this case)

Additional gas line with Mass Flow Controller for e.g. argon, forming gas or nitrogen. Other gases on request.

Three additional gas line with Mass Flow Controller for e.g.  argon, forming gas or nitrogen. Other gases on request.

Circulating Fluid Temperature Controller - water cooled

Technical specification:

• Cooling method: water cooled
• Refrigerant: R410A (FKW)
• Control method: PID control
• Ambient temperature range: 5...45 °C

Circulating fluid system:

• Circulating fluid: deionized water
• Set temperature range: 5...35 °C
• Cooling capacity: 9.0 kW (@ 50 Hz)
• Temperature stability: ±0,5 K
• Nominal water flow: 29 l/min (@ 50 Hz)
• Tank capacity: 18 l
• Outlet for circulating fluid, return outlet for circulating fluid: G 1
• Tank drain outlet: G 1/4
• Contact material: Stainless steel (including heat exchanger brazing), SiC, carbon, PP, PE, POM, FKM, NBR, EPDM, PVC, PTFE

Facility water system:

• Temperature range: 5...40 °C
• Pressure range: 3...5 bar (0.3...0.5 MPa)
• Required water flow: 25 l/min
• Required pressure difference: min. 3 bar (0.3 MPa)
• Facility water ort size: G 1/2
• Contact material: Stainless steel (including heat exchanger brazing), bronze, brass, PTFE, NBR, EPDM

Electrical system:

• Power supply: 3-phase 380...415 V AC (50/60 Hz); permitted voltage range ±10% (no continuous voltage fluctuations)
• Earth leakage circuit breaker (Standard): nominal current: 20 A; leakage current sensitivity: 30 mA
• Rated operating current 50/60 Hz: 6.4/6.7 A
• Rated power consumption 50/60 Hz: 3.4/4.2 kW
• Noise level (front side 1 m/height 1 m): 65 dB(A)
• Dimensions: 377 mm x 970 mm x 1080 mm (W x D x H)

Weight (dry): about 124 kg

Safety measures for use of forming gas and oxygen gas

Technical description:

Mutual lock of process gas lines preventing simultaneous use of both forming gas and oxygen gas

Automatically performed leakage measurement from process chamber until inlet valve

(integrated chamber leakage test)

Switch box for vacuum pump

Technical specification:

• For remote control of vacuum pump electrically supplied with single phase (230 V AC)
• Integrated at bottom rear side of  ???????? system (pos. 1)
• Blue powerCON socket for power supply cable (from power socket)
• Grey powerCON socket for power supply cable (to vacuum pump)
• Including two cables (each 2 meters long): Power supply cable terminated with local plug (see below bullet) and blue powerCON connector; Vacuum pump cable terminated with grey powerCON connector and C13 rubber connector
• Local plug (PLEASE SELECT SUITABLE PLUG AND DELECT THE REST!): Denmark (DS 60884-2-D1), Schuko (CEE 7/4), Japan, USA (NEMA 5-15), Australie, China (GB 1002), South Korea (CEE 7/4), Switzerland (SEV 1011)

Free of charge in case that vacuum pump is purchased through UniTemp GmbH

Switch box for chiller

Technical specification:

• For remote control of recirculating water chiller electrically supplied with single phase (100...230 V AC)
• Integrated at bottom rear side of RTP-100 system (pos. 1)
• Blue powerCON socket for power supply cable (from power socket)
• Grey powerCON socket for power supply cable (to chiller)
• Including two cables (each 2 meters long): Power supply cable terminated with local plug (see below bullet) and blue powerCON connector; Chiller cable terminated with grey powerCON connector and C13 rubber connector
• Local plug: China (AS 3112)
• Dimensions: 145 mm x 140 mm x 55 mm; Weight: 0.5 kg

Free of charge in case that recirculating water chiller is purchased through UniTemp GmbH

Service Cart with rolls

Weight: 40 kg

Dimension: 600x780x915mm

Cabinet with integrated Universal Heat Exchanger

Width: 600 mm ; Depth: 780 mm

Total height: 915 mm

Technical specification of heat exchanger:

• Pump: 230 V / 50 Hz / 600 W
• Water tank capacity: 70 liters
• Cooling capacity: 10 kW
• Weight: 68 kg (empty tank)
• Water inlet pressure: 5 bar (0.5 MPa)

Water inlet temperature: 16 ... 20 °C

Cabinet with integrated Universal Heat Exchanger

Width: 600 mm ; Depth: 780 mm

Total height: 915 mm

Technical specification of heat exchanger:

• Pump: 200 V / 60 Hz / 600 W
• Water tank capacity: 70 liters
• Cooling capacity: 10 kW
• Weight: 68 kg (empty tank)
• Water inlet pressure: 5 bar (0.5 MPa)

Water inlet temperature: 16 ... 20 °C

Cabinet with integrated Universal Heat Exchanger

Width: 600 mm ; Depth: 780 mm

Total height: 915 mm

Technical specification of heat exchanger:

• Pump: 400 V / 3~ + P + PE / 50 Hz (only!) / 600 W
• Water tank capacity: 70 liters
• Cooling capacity: 10 kW
• Weight: 68 kg (empty tank)
• Water inlet pressure: 5 bar (0.5 MPa)

Water inlet temperature: 16 ... 20 °C

Cabinet with integrated Universal Heat Exchanger

Width: 600 mm ; Depth: 780 mm

Total height: 915 mm

Technical specification of heat exchanger:

• Pump: 200 V / 60 Hz / 600 W
• Water tank capacity: 70 liters
• Cooling capacity: 10 kW
• Weight: 68 kg (empty tank)
• Water inlet pressure: 5 bar (0.5 MPa)

Water inlet temperature: 16 ... 20 °C

Universal Heat Exchanger

Technical specification:

• Pump: 200-240 V / 50-60 Hz / 0.6 kW
• Water tank capacity: 30 liters
• Cooling capacity: 10 kW
• Dimension: 504 x 714 x 412 mm (L x W x H)
• Weight: 46 kg (empty tank)
• Water inlet pressure: 5 bar (0.5 MPa)

Water inlet temperature: 16 ... 20 °C

Seismic fixture of cabinet

Technical description:

This option includes upgrade of service cart with three mounting brackets and provision of seismic jigs for seismic fixture of mounting brackets to floor.

Stromversorgung RTP-100

3 x 400 V, 3~ + N + PE, 50-60 Hz, Y, 32 A, 20 kW

Power Japan RTP-100

3 x 200 V, 3~ + PE, 50-60 Hz, 20 kW, 58 A

Power RTP-100 USA (230V nom.volt.)

3 x 208 V, 3~ + PE, 50-60 Hz, 16 kW, 45 A, Triangle () configuration

Nominal voltage/wattage of IR heater: 230 V/1100 W

3 x 400 V, 3~ + N + PE (Y configuration), 21 kW, 32 A

Notes:

1) 400 V: voltage between two phases (voltage between one phase and neutral wire: 230 V)

2) Nominal IR lamp voltage/wattage: 230 V/1000 W

Power RTP-150 Japan

3 x 200V, 3~ + PE, 24 kW, max. 70 A

Strom RTP-150 USA

3x208V,3~+PE, 20 kW

Power RTP-200 EU

3 x 400 V, 3~ + N + PE (Y configuration), 21 kW, 32 A

Notes:

1) 400 V: voltage between two phases (voltage between one phase and neutral wire: 230 V)

2) Nominal IR lamp voltage: 230 V

Power RTP-200 Japan

3x200V,3~+PE, 24 kW

Power RTP-200 US

3 x 208 V, 3~ + PE, D configuration, 23.5 kW, 65 A

Technical comments:

1) Nominal voltage/wattage of IR heater: 210 V/1000 W

2) Voltage between phases: 208 V

3) Voltage during Factory Acceptance Test: 200 V

Power Supply VSS Europa

32A CEE, 3 x 400 V, 3 Phases  + N + PE, Star configuration (Y), 18 kW

Notes:

1) The VSS system is provided with a power supply cable terminated with 32A connector according to IEC 60309 (3L+N+PE, 6h).

2) 400 V is the voltage between two phases (230 V is voltage between one phase and neutral wire)

3) Nominal voltage of IR heater: 230 V

Power VSS-450-300 Japan

3 x 200 V, 3~ + PE, Delta () configuration, 50...60 Hz, 18 kW, 52 A

Power VSS USA

3 x 208V, 3~ + PE, triangle ( configuration, 15 kW, 54 A

Technical specification:

Nominal voltage/wattage of one IR lamp : 230 V/750 W

Reduction of maximum heating rate (see pos. 1) due to reduced power

Power RSS-160 EU

230 V, 50...60 Hz, P+N+PE, 2.4 kW

Power RSS-160 JAPAN

200 V, 2~ + PE, 2.0 kW

Power RSS-160 USA

115 V, P + PE, 2.4 kW, 20 A

Notes:

1) Nominal voltage/wattage of heater cartridge: 115 V/400 W

2) Maximum current: 20 A

Power RSO-200 EU

Electrical power supply:

3 x 400 V, 3~ + N + PE, 11 kW, star (Y configuration, 3 x 16 A

Nominal IR lamp voltage: 230 V

Power Japan RSO-200

3 x 200 V, 3~ + PE, 50-60 Hz, 12 kVA, max. 35 A

Technical specification:

Nominal power/voltage of IR heater: 1000 W/ 200 V

Total number of IR heaters: 12 pcs. (bottom IR lamp field)

Power RSO-200 USA

3 x 208 V, 3~ + PE, 10 kW, triangle configuration (), 27 A

Nominal voltage of IR heater: 230 V

Power RSO-300 EU

Electrical power supply: 3 x 400 V, 3~ + N + PE, 18 kW, star (Y) configuration, 3 x 32 A

Power RSO-300 US

3x208V,3~+PE, 20 kW

Power RSO-300 Japan

3 x 200V, 3~ + PE, D (triangle) configuration, 24 kW,

ZrOx sensor based atmospheric oxygen analyzer

Technical specification:

Measurement range of oxygen (O2) concentration: 0...1000 ppm (= 0.1 Vol-%)

Operational pressure: atmosphere

Values of oxygen concentration in process chamber can be displayed on touch panel of base system and can be logged into process data (when option is checked in menu "datalogger")

Sensor element: miniaturized Zirconium Dioxide plate operated at elevated temperature that is controlled by a platinum resistor

Portable residual gas concentration measurement for oxygen traces in ppm and ppb range

Technical specification:

• Portable measurement unit for measurement of oxygen traces in ppm and ppb range (Model GSM-touch made by Metrotec GmbH)
• A part of the process gases from the gas exhaust will be diverted through a vacuum valve into the oxygen gas sensor.
• The oxygen concentration or the oxygen partial pressure can be displayed on a 7" diagonal LCD at the front side of portable measurement unit. Both values are provided to VPO-1000-300 system and are logged into process data.
• The measurement of oxygen gas concentration is done at atmospheric conditions.
• The gases to be analyzed should be dry and should not contain particles with a size of more than 5 µm.
• Dimensions: 330 mm x 320 mm x 80 mm (H x W x D, including carrying handle)
• Weight: 3.5 kg

Power supply voltage: 230 V AC

Temperature extension up to 500 °C / instead of an aluminium plate a black chromium coated copper plate will be used as heating plate

Reduction of maximum ramp up rate to 90 K/min (= 1.5 K/sec)

Additional thermocouple with monitoring/logging function (RSS-210-S only)

Technical specification:

• On right side of heating plate a thermocouple (TC) connector is mounted and connected to process controller using a TC extension line.
• The thermocouple (type K (NiCr-Ni), length: 300 mm, diameter: 0.5 mm, with ceramic miniature connector) can be connected to this TC connector for flexible measurement on substrate surface.
• The temperature of additional TC can be displayed and logged by touch panel of RSS-210-S reflow solder system.

Maximum number of additional (flexible) thermocouples is two (2).

Temperature extension up to 500 °C (with Ni plated copper plate instead of aluminium plate)

Upgrade of RSS-210-S hinged cover with large viewport (150 mm diameter)

Integrated Formic Acid Module with separate MFC for carrier gas (N2)

Technical specification:

• The carrier gas (nitrogen gas, N2) enters the vessel which is filled with formic acid (HCOOH) (integrated in housing of reflow solder system). From the liquid surface it will take small traces and lead them to process chamber. There the formic acid causes the reduction of native oxide layers and the improved wetting of solder.

The reflow solder system is upgraded with an additional process gas line including a dedicated mass flow controller (MFC) for nitrogen gas (maximum flow: 5 Nlm (Normliter/minute)) as carrier gas for formic acid.

Formic Acid Module integrated but sharing the existing N2 gas line

Technical specification:

• The carrier gas (nitrogen gas, N2) enters the vessel which is filled with formic acid (HCOOH) (integrated in housing of reflow solder system). From the liquid surface it will take small traces and lead them to process chamber. There the formic acid causes the reduction of native oxide layers and the improved wetting of solder.
• The standard process gas line is shared between the direct connection into process chamber and a bypass through the formic acid vessel (i.e. no additional process gas line!).
• The flow of carrier gas (nitrogen gas, N2) is controlled by the mass flow controller (MFC) of standard system.

Process chamber will be upgraded by an interlock pin which prevents unintended opening of hinged cover during running process.

automatic refilling system of formic acid (only in combination with either option FAII or FAIII)

Universal safety labor hood , Size L

Technical specification:

• This safety cabinet is suited e.g.  for vacuum process systems with process gas line for pure hydrogen (H2) gas
• Hydrogen Safety Hood (top section):
• The safety cart in bottom sectioncan be upgraded with a Universal Heat Exchanger
• Dimensions: 1000 mm x 1000 mm x 2000 mm (W x D x H)

Weight: about 175 kg (including service cart, without UHE and gas box)

Extended holding times for RTP-100, RTP-150 and RTP-200 systems

Technical specification:

1) Applicable to RTP-150 and RTP-200 based systems with option RTP-HT-150 and RTP-HT-200, respectively

2) Applicable to RTP-100 based systems

3) Type N (NiCrSi-NiSi) thermocouple instead of type K (NiCr-Ni) thermocouple as reference thermocouple

4) Enhanced mechanical stability

5) Maximum hold times (RTP-100): 10 min @ 1200 °C; 30 min @ 1100 °C; 1h @ 1010 °C

6) Maximum hold times (RTP-150, RTP-200): 3 min @ 1200 °C; 6 min @ 1100 °C; 20 min @ 1010 °C

7) Requires very powerful cooling water system: CAB-UHE (water tank with 70 l volume) or WC IV (10 kW cooling capacity)

Integrated switch box for vacuum pump and chiller

Technical specification:

• For remote control of vacuum pump and chiller electrically supplied with single phase (230 V AC)
• Integrated at bottom rear side of RTP-200/VPO-300/VSS-300 system (pos. 1)
• Blue powerCON socket for power supply cable (from power socket)
• Grey powerCON socket for power supply cable (to vacuum pump)
• Chiller power supply cable: replacement of Schuko (CEE 7/4) socket with grey powerCON socket
• Including two cables (each 2 meters long): Power supply cable terminated with local plug (see below bullet) and blue powerCON connector; Vacuum pump cable terminated with grey powerCON connector and C13 rubber connector
• Local plug (PLEASE SELECT SUITABLE PLUG AND DELECT THE REST!): Denmark (DS 60884-2-D1), Schuko (CEE 7/4), Japan, USA (NEMA 5-15), Australie, China (GB 1002), South Korea (CEE 7/4), Switzerland (SEV 1011)

Free of charge in case that vacuum pump is purchased through UniTemp GmbH

RTP-EP-200 with ramp up rate 100K/sec (power x2)

Extension of maximum temperature of RTP-150 system (pos. 1) from 1000 °C to 1200 °C

Technical specification:

• Holding time depends on water cooling system
• Ramp up rate: T < 1000 °C:                up to 75 K/sec
• Ramp up rate: 1000 °C < T < 1200 °C: up to 50 K/sec
• Maximum temperature: 1200 °C (for a maximum of 30 sec)
• Maximum hold times: 60 sec @ 1100 °C; 3 min @ 1000 °C
• Temperature control by thermocouple (type K) with temperature resistant sheath material

Tip of thermocouple wire located in quartz glass tube for preventing direct contact with Si wafer

Doubling of total power and extension of maximum temperature of RTP-150 system (pos. 1)

Technical specification:

• Increase of total power of RTP-150 system to 2 x 21 kW (requires second power supply cable 3 x 400 V, 32 A)
• Increase of maximum temperature from 1000 °C to 1200 °C
• Holding time depends on water cooling system
• Ramp up rate: T < 1000 °C:                up to 150 K/sec
• Ramp up rate: 1000 °C < T < 1200 °C: up to 100 K/sec
• Maximum temperature: 1200 °C (for a maximum of 90 sec)
• Maximum hold times: 180 sec @ 1100 °C; 10 min @ 1000 °C
• Temperature control by thermocouple (type K) with temperature resistant sheath material

Tip of thermocouple wire located in quartz glass tube for preventing direct contact with Si wafer

Upgrade of RSO-210 reflow solder oven with additional top IR lamp field

Technical specification:

• Upgrade of aluminium process chamber with additional top IR lamp field

Change in electric power supply from 400V/16A to 400V/32A (3~ + N + PE)

Heated cover for use with flux for avoiding condensation of flux

Adaption to lite overpressure (0.2 bar relative pressure)

Technical explanation:

Modification of VSS-450-300 system (pos. 1) for vacuum and lite overpressure (pressure range 2...1200 hPa absolute) in process chamber

Modification of VSS-450-300 system (pos. 1) for overpressure (3 bar = 0.3 MPa absolute pressure, 2 bar = 28 psi relative to STP) in process chamber

Pressure sensor suited for both vacuum (1000 ... 2 mbar absolute) and overpressure (0 ... 2 bar relative)

Top Heat (24 lamps) arranged in crossed alignment

Technical specification:

• Total power of top IR lamp field: 18 kW

Additional B32 power supply connector at rear side of VSS-450-300 system (pos. 1)

Water cooled graphite heating plate for VSS

Technical specification:

• Material: isostatic graphite (G-2554)
• Dimensions: 320 mm x 320 mm x 15 mm (W x D x H)
• Available sample area (on mesa): 306 mm x 306 mm

According to technical drawing 0126_0835_Druckkammer-Heizplatte

Quartz glass frame surrounding VSS heating plate (4parts)

Technical specification:

• Material: HSQ 300, opaque

Size: 350 mm x 350 mm x 3mm (W x D x H), with square cutout for heating plate

Separation plate in top cover of VPO-1000-300 system (pos. 1)

Technical specification:

• Separation of top IR lamp field from process chamber
• Recommended for use of not inert process gases
• Material: quartz glass

Thickness: 3 mm

Replacement of heating plate (made of isostatic graphite) of VSS-450-300

system (pos. 1) by heating plate made of Ni coated copper

Limitation of maximum temperature to 350 °C

VPO/VSS-ExOH extended opening height 200 mm -> 300 mm

Chamber made of stainless steel (VA 1.4305) polished, instead of aluminium, 50 mm

Option to lift single wafers (diameter 150 mm, 200 mm or 300 mm) from quartz glass holder or from heating plate

Technical specification:

• For single wafer with 150 mm, 200 mm or 300 mm diameter
• 150 mm single wafer will be supported by three lift pins and guided by four guide pins
• 200 mm single wafer will be supported by three lift pins and guided by six guide pins
• 300 mm single wafer will be supported by three lift pins and guided by four guide pins
• Length of lift pins: 112 mm
• Length of guide pins: 117 mm
• Lifted wafer can be unloaded by robotic arm from right side

Lift pin operation can be executed by manual control (push buttons on front panel) or through external control interface

Quartz tray for support of single 150 mm dia wafer in RTP-150/RTP-150-HV system

Technical specification:

• Material: Quartz glass
• Features four (4) support points
• Compatible: to single wafer with 150 mm diameter

According to technical drawing 0015_0966

Quartz tray for support of graphite susceptor in RTP-150/RTP-150-HV system

Technical specification:

• Material: Quartz glass
• Features eight support points
• Compatible: to graphite susceptor with 160 mm x 160 mm dimensions

According to technical drawing 0015_0969

Quartz tray for support of single 100 mm dia wafer in RTP-100/RTP-100-HV system

Technical specification:

• Material: Quartz glass
• Features four (4) support points
• Compatible: to single wafer with 100 mm diameter

According to technical drawing 0081_0500

Quartz tray for support of graphite susceptor in RTP-100/RTP-100-HV system

Technical specification:

• Material: Quartz glass
• Features four support points
• Compatible: to graphite susceptor with 110 mm x 110 mm dimensions

According to technical drawing 0081_0000

Susceptor suitable for RTP-100 system (pos. 1)

Technical specification:

• Material: isostatic graphite
• Outside dimensions: 110 mm x 110 mm x 3 mm (L x W x H)
• Available sample area: 102 mm x 102 mm
• Including sack hole providing direct contact of thermocouple with susceptor

Reduction of ramp up and cool down rate to about 10 K/sec due to thermal mass of susceptor

Susceptor suitable for RTP-150 system (pos. 1)

Technical specification:

• Material: isostatic graphite
• Dimensions: 160 mm x 160 mm x 4 mm (L x W x H; height is subject to technical changes)
• Including sack hole providing direct contact of thermocouple with susceptor

Reduction of ramp up and cool down rate to about 10 K/sec due to thermal mass of susceptor

Susceptor suitable for RTP-200 and VPO-1000-300 vacuum process ovens

Technical specification:

• Material: isostatic graphite
• Size: 210 mm x 210 mm

Available sample area: 206 mm x 206 mm

Susceptor for use in VPO-1000-300 vacuum process oven

Technical specification:

• Material: isostatic graphite
• Dimension: 356 mm x 356 mm x 3 mm (W x D x T)
• Available sample area: 300 mm x 300 mm
• Including sack hole for direct contact of thermocouple with susceptor (closed feedback loop for heating)

Reduction of ramp rate (to about 10 K/sec) and of ramp down rate due to thermal mass of susceptor

Frame suitable for support of single 200 mm diameter wafer in VPO-1000-300 system

Technical description:

• Minimum contact area of wafer with quartz glass
• Wafer placed at center between two lamp fields
• No shading effect

Individual holders for different wafer diameters (150 mm, 200 mm, 300 mm)

Quartz tray for support of single 200 mm dia wafer in RTP-200/RTP-200-HV system

Technical specification:

• Material: Quartz glass
• Features four (4) support points
• Compatible: to single wafer with 200 mm diameter

According to technical drawing 0016_0092

Standard quarz holder integrated in door

Graphite crucible 260x260x7mm made of isostatic graphite, suitable for RSO-QH-300 quartz holder

Quartz tray for support of graphite susceptor in RSO210/RTP-210-HV system

Technical specification:

• Material: Quartz glass
• Features eight support points
• Compatible: to graphite susceptor with 206 mm x 206 mm dimensions

According to technical drawing 0016_0091

Susceptor suitable for RSO-210 system (pos. 1)

Technical specification:

• Material: isostatic graphite
• Dimensions: 201 mm x 201 mm x 7 mm (L x W x H; height is subject to technical changes)

Including sack hole providing direct contact of thermocouple with susceptor

Process chamber suitable for RTP-100 system (pos. 1)

Technical specification:

• Material: quartz glass

Inner dimensions: 134 mm width, 18 mm height

Process chamber suitable for RTP-100-HV system (pos. 1)

Technical specification:

• Material: quartz glass

Inner dimensions: 134 mm width, 18 mm height

Process chamber muffle suitable for RTP-150 system (pos. 1)

Technical specification:

• Material: quartz glass

Inner dimensions: 214 mm width, 40 mm height

Process chamber muffle suitable for RTP-150-HV system (pos. 1)

Technical specification:

• Material: quartz glass
• Inner dimensions: 214 mm width, 40 mm height

Including mechanical adaption to high vacuum (HV) system

Process chamber muffle suitable for RTP-200/RTP-200-HV system (pos. 1)

Technical specification:

• Material: quartz glass

Inner dimensions: 231 mm width, 40 mm height

Adaption of RTP-150 system (pos. 1) to glovebox

Technical description:

A Media Interface Plate (e.g. manufactured from high-pressure laminate like Trespa) replicated the connections located at rear side of RTP-150 system (pos. 1): electric power supply (3 x 400 V, 32 A), cooling water (10 mm, 12 mm), one process gas line (N2), CDA (compressed dry air), vacuum (DN 16 KF), gas outlet (DN 16 KF) and network. On both sides of this Media Interface Plate suitable connectors are located. Scope of delivery includes all cables (electric power, network), tubes (cooling water, N2, CDA) and pipes (vacuum, gas outlet) required for connecting the RTP-150 system with inner side of Media Interface Plate (inside the Glovebox). The cables and tubes required for the outside of glovebox are scope of delivery of RTP-150 system.

Dimensions: to be determined after purchase order!