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RSO-210

Reflow Solder oven for substrate size up to 200 x 200 mm up to 650 C

Made in
Germany
easy to
maintain
Download

Configuration

gas line
Pressure measurement
Vacuum pump
Cooling system
Formic Acid trap
Hydrogen option
Additional Thermocouple
Moisture measurement
Interlock
Pat Light
Switchbox

Product code: RSO-210

Product price: on request
Delivery time: on request




Reflow Solder OvenTechnical Data RSO-210:

  • Loading area (max. part size): 200x200x40mm (WxDxH)
  • Quartz glass tray (fix mounted), incl. graphite susceptor
  • with integrated gas- in- and outlet
  • 1 Mass Flow Controller fr Nitrogen 5 nlm is standard
  • heated by 12 Infrared lamps ( 9kW)
  • bottom heating
  • vacuum for external pump system (up to 10exp.-3 hPa, optional RSO-200-HV up to 10exp-6 hPa)
  • SPS controller, SIMATIC
  • 50 programs with 50 steps each storable
  • 7" Touch Panel for comfortable programming and process control   
  • Ethernet interface
  • Max. Temperature: 650 °C
  • Ramp up rate: better 10 K/Sec
    Ramp down rate: T=600°C to 400°C max. 200 K/min
    T=400°C to 100°C max. 30K/min
  • Temperature control by thermocouple
  • Cooling: Water cooling required (option)
  • Electrical connection: CEE 16 A (3x230V, 3 Phase, +N, +PE)
  • Weight: about 55 kg
  • Dimension: 505mm x 504mm x 460mm

Options and accessories:

RSO-210 Basic system with high vacuum pump up to 10xp-3 hPa (pump not included)
RSO-MFC Gas line with mass flow controller, max. 4 gas lines 
H2 / Flame-off optional use of pure Hydrogen with flame off unit
Hood L  Safety hood when using pure hydrogen
RSO-PC-xx add,. process chamber , to be used with one controller, parallel working of both chambers is not possible 
RTP200-QC Quartz chamber (recommended when formic acid is used)
RTP200-QTGT-206mm Quartz tray for grahite susceptor  206mm
RTP200-GT-201mm Graphite susceptor for 200x200mm substrate size
RSO-TC add. thermocouple to measure on the substrate  (max. 2)
WC III closed loop water cooling system

 

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