HP300frei.jpg

HP-300

This high precision hot chuck has a heated area with  310 x 310 mm.
It can be used as build-in or stand-alone chuck with an external controller.

The vacuum hot plate has vacuum holes in a pitch of 25mm each (1mm Diameter)
for holding the substrate or wafer.

The maximum temperature is 300 °C.

3-Zone-temperature measurement

incl. Software for managing the temperature profiles

IP code 23

Die Vakuumplatte hat Rasterbohrungen im 25mm Abstand (1mm Bohrungen)
Die maximale Temperatur beträgt 300 °C.

3-Zonen-Temperaturmessung
inkl. Software zur Verwaltung von Temperaturprofilen
Gehäuseart: IP23

Download
DB_HP_300_EN
Acrobat Reader PDF DBHP-300EN.pdf (1,5 MB)