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HP-300

Heated chuck for 300 mm x 300 mm substrates or 300 mm Diameter

Made in
Germany
easy to
maintain
Download

This high precision hot chuck has a heated area with  310 x 310 mm.
It can be used as build-in or stand-alone chuck with an external controller.

The vacuum hot plate has vacuum holes in a pitch of 25mm each (1mm Diameter)
for holding the substrate or wafer.

The maximum temperature is 300 °C.

3-Zone-temperature measurement

incl. Software for managing the temperature profiles

IP code 23

Die Vakuumplatte hat Rasterbohrungen im 25mm Abstand (1mm Bohrungen)
Die maximale Temperatur beträgt 300 °C.

3-Zonen-Temperaturmessung
inkl. Software zur Verwaltung von Temperaturprofilen
Gehäuseart: IP23