Rapid Thermal Vacuum Process Oven with ramp-up rate up to 150 K/sec.
Key features are
Multipurpose table top unit with front loading drawer for the following applications:
The oven will be programmed by a Siemens SPS controller. This allows the storage of 50 programs with saving all temperature profiles and segments.
Options and accessories like water cooler, additional flow meters, additional gas lines, additional thermocouple etc. are available on request. This tool
is for various applications and customers. The small size allows comfortable loading and unloading of the chamber. The oven can be easily placed on
a standard laboratory table.
Options and accessories:
|RTP-100||Basic unit with 1 MFC for Nitrogen (5 nlm)|
|RTP-MFC||Mass Flow controller (max. 4 in total)|
|VAC I||Vacuum up to 3 hPa incl. Vacuum sensor and valve (excl. Pump)|
|VAC II||Vacuum up to 10E-3 hPa incl. Vacuum sensor and valve (excl. Pump)|
|MP||Membrane or diapgrahm pump|
|RVP||Rotary vane pump|
|RTP-H2+H2S||Hydrogen Module to use 100% Hydrogen with safety device incl. MFC|
|RTP-SW||Switchbox for chiller and/or vacuum pump|
|RTP-TC||Add. Thermocouple to measure on device (max. 1 pc)|
|RTP-VCR||VCR connectors and lines (on request)|
|WC III||Closed loop water cooling station|
|RTP-GP||Graphite Plate or suzceptor (SiC coated: on request)|
|RTP-PC-100||additional oven chamber for usage with one process controller unit (double pack oven) 100 mm|
|RTP-QR-50||Adapter for 50 mm wafer|
|RTP-QR-75||Adapter for 75 mm wafer|
||DBRTP-100Apr2019.pdf (1,7 MB)|